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Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of...

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Detalles Bibliográficos
Autores principales: Zhu, Rong, Ding, Henggao, Su, Yan, Yang, Yongjun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231226/
https://www.ncbi.nlm.nih.gov/pubmed/22163655
http://dx.doi.org/10.3390/s100908304
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author Zhu, Rong
Ding, Henggao
Su, Yan
Yang, Yongjun
author_facet Zhu, Rong
Ding, Henggao
Su, Yan
Yang, Yongjun
author_sort Zhu, Rong
collection PubMed
description Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication.
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spelling pubmed-32312262011-12-07 Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors Zhu, Rong Ding, Henggao Su, Yan Yang, Yongjun Sensors (Basel) Article Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of a mechanical proof mass as key moving and sensing elements. This paper presents an analytical modeling for a micromachined thermal gas gyroscope integrated with signal conditioning. A simplified spring-damping model is utilized to characterize the behavior of the sensor. The model relies on the use of the fluid mechanics and heat transfer fundamentals and is validated using experimental data obtained from a test-device and simulation. Furthermore, the nonideal issues of the sensor are addressed from both the theoretical and experimental points of view. The nonlinear behavior demonstrated in experimental measurements is analyzed based on the model. It is concluded that the sources of nonlinearity are mainly attributable to the variable stiffness of the sensor system and the structural asymmetry due to nonideal fabrication. Molecular Diversity Preservation International (MDPI) 2010-09-02 /pmc/articles/PMC3231226/ /pubmed/22163655 http://dx.doi.org/10.3390/s100908304 Text en © 2010 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Zhu, Rong
Ding, Henggao
Su, Yan
Yang, Yongjun
Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors
title Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors
title_full Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors
title_fullStr Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors
title_full_unstemmed Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors
title_short Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors
title_sort modeling and experimental study on characterization of micromachined thermal gas inertial sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231226/
https://www.ncbi.nlm.nih.gov/pubmed/22163655
http://dx.doi.org/10.3390/s100908304
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