Optimization of Urea-EnFET Based on Ta(2)O(5) Layer with Post Annealing

In this study, the urea-enzymatic field effect transistors (EnFETs) were investigated based on pH-ion sensitive field effect transistors (ISFETs) with tantalum pentoxide (Ta(2)O(5)) sensing membranes. In addition, a post N(2) annealing was used to improve the sensing properties. At first, the pH sen...

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Detalles Bibliográficos
Autores principales: Lue, Cheng-En, Yu, Ting-Chun, Yang, Chia-Ming, Pijanowska, Dorota G., Lai, Chao-Sung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231357/
https://www.ncbi.nlm.nih.gov/pubmed/22163862
http://dx.doi.org/10.3390/s110504562

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231357/
https://www.ncbi.nlm.nih.gov/pubmed/22163862
http://dx.doi.org/10.3390/s110504562

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