Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors

One of the key components of a chemical gas sensor is a MEMS micro-heater. Micro-heaters are used in both semiconductor gas sensors and NDIR gas sensors; however they each require different heat dissipation characteristics. For the semiconductor gas sensors, a uniform temperature is required over a...

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Detalles Bibliográficos
Autores principales: Hwang, Woo-Jin, Shin, Kyu-Sik, Roh, Ji-Hyoung, Lee, Dae-Sung, Choa, Sung-Hoon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231638/
https://www.ncbi.nlm.nih.gov/pubmed/22163756
http://dx.doi.org/10.3390/s110302580

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231638/
https://www.ncbi.nlm.nih.gov/pubmed/22163756
http://dx.doi.org/10.3390/s110302580

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