Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)

The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequ...

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Detalles Bibliográficos
Autores principales: Arapan, Lilia, Alexieva, Gergana, Avramov, Ivan D., Radeva, Ekaterina, Strashilov, Vesseline, Katardjiev, Ilia, Yantchev, Ventsislav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231650/
https://www.ncbi.nlm.nih.gov/pubmed/22163994
http://dx.doi.org/10.3390/s110706942

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231650/
https://www.ncbi.nlm.nih.gov/pubmed/22163994
http://dx.doi.org/10.3390/s110706942

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