Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)

The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequ...

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Detalles Bibliográficos
Autores principales: Arapan, Lilia, Alexieva, Gergana, Avramov, Ivan D., Radeva, Ekaterina, Strashilov, Vesseline, Katardjiev, Ilia, Yantchev, Ventsislav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231650/
https://www.ncbi.nlm.nih.gov/pubmed/22163994
http://dx.doi.org/10.3390/s110706942
Descripción
Sumario:The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.

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