Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)

The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequ...

Descripción completa

Detalles Bibliográficos
Autores principales: Arapan, Lilia, Alexieva, Gergana, Avramov, Ivan D., Radeva, Ekaterina, Strashilov, Vesseline, Katardjiev, Ilia, Yantchev, Ventsislav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231650/
https://www.ncbi.nlm.nih.gov/pubmed/22163994
http://dx.doi.org/10.3390/s110706942
_version_ 1782218255789719552
author Arapan, Lilia
Alexieva, Gergana
Avramov, Ivan D.
Radeva, Ekaterina
Strashilov, Vesseline
Katardjiev, Ilia
Yantchev, Ventsislav
author_facet Arapan, Lilia
Alexieva, Gergana
Avramov, Ivan D.
Radeva, Ekaterina
Strashilov, Vesseline
Katardjiev, Ilia
Yantchev, Ventsislav
author_sort Arapan, Lilia
collection PubMed
description The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.
format Online
Article
Text
id pubmed-3231650
institution National Center for Biotechnology Information
language English
publishDate 2011
publisher Molecular Diversity Preservation International (MDPI)
record_format MEDLINE/PubMed
spelling pubmed-32316502011-12-07 Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR) Arapan, Lilia Alexieva, Gergana Avramov, Ivan D. Radeva, Ekaterina Strashilov, Vesseline Katardjiev, Ilia Yantchev, Ventsislav Sensors (Basel) Article The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented. Molecular Diversity Preservation International (MDPI) 2011-07-04 /pmc/articles/PMC3231650/ /pubmed/22163994 http://dx.doi.org/10.3390/s110706942 Text en © 2011 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/).
spellingShingle Article
Arapan, Lilia
Alexieva, Gergana
Avramov, Ivan D.
Radeva, Ekaterina
Strashilov, Vesseline
Katardjiev, Ilia
Yantchev, Ventsislav
Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
title Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
title_full Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
title_fullStr Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
title_full_unstemmed Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
title_short Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
title_sort highly mass-sensitive thin film plate acoustic resonators (fpar)
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231650/
https://www.ncbi.nlm.nih.gov/pubmed/22163994
http://dx.doi.org/10.3390/s110706942
work_keys_str_mv AT arapanlilia highlymasssensitivethinfilmplateacousticresonatorsfpar
AT alexievagergana highlymasssensitivethinfilmplateacousticresonatorsfpar
AT avramovivand highlymasssensitivethinfilmplateacousticresonatorsfpar
AT radevaekaterina highlymasssensitivethinfilmplateacousticresonatorsfpar
AT strashilovvesseline highlymasssensitivethinfilmplateacousticresonatorsfpar
AT katardjievilia highlymasssensitivethinfilmplateacousticresonatorsfpar
AT yantchevventsislav highlymasssensitivethinfilmplateacousticresonatorsfpar

Ejemplares similares