FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer

The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in wh...

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Detalles Bibliográficos
Autores principales: Vera-Salas, Luis Alberto, Moreno-Tapia, Sandra Veronica, Garcia-Perez, Arturo, de Jesus Romero-Troncoso, Rene, Osornio-Rios, Roque Alfredo, Serroukh, Ibrahim, Cabal-Yepez, Eduardo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231721/
https://www.ncbi.nlm.nih.gov/pubmed/22164040
http://dx.doi.org/10.3390/s110807710

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231721/
https://www.ncbi.nlm.nih.gov/pubmed/22164040
http://dx.doi.org/10.3390/s110807710

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