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Fabrication of Large Area Periodic Nanostructures Using Nanosphere Photolithography

Large area periodic nanostructures exhibit unique optical and electronic properties and have found many applications, such as photonic band-gap materials, high dense data storage, and photonic devices. We have developed a maskless photolithography method—Nanosphere Photolithography (NSP)—to produce...

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Detalles Bibliográficos
Autores principales: Wu, Wei, Dey, Dibyendu, Memis, Omer G, Katsnelson, Alex, Mohseni, Hooman
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2008
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3244895/
http://dx.doi.org/10.1007/s11671-008-9164-y