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Fractal Nanotechnology
Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 10(2)–10(5) nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterni...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2008
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3244899/ http://dx.doi.org/10.1007/s11671-008-9170-0 |