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Fractal Nanotechnology

Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 10(2)–10(5) nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterni...

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Detalles Bibliográficos
Autores principales: Cerofolini, GF, Narducci, D, Amato, P, Romano, E
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2008
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3244899/
http://dx.doi.org/10.1007/s11671-008-9170-0
Descripción
Sumario:Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 10(2)–10(5) nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterning technology, in this way permitting the controlled preparation of fractal surfaces.