High-rate low-temperature dc pulsed magnetron sputtering of photocatalytic TiO(2)films: the effect of repetition frequency

The article reports on low-temperature high-rate sputtering of hydrophilic transparent TiO(2)thin films using dc dual magnetron (DM) sputtering in Ar + O(2)mixture on unheated glass substrates. The DM was operated in a bipolar asymmetric mode and was equipped with Ti(99.5) targets of 50 mm in diamet...

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Detalles Bibliográficos
Autores principales: Šícha, J, Heřman, D, Musil, J, Strýhal, Z, Pavlík, J
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2007
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3245660/
https://www.ncbi.nlm.nih.gov/pubmed/21806850
http://dx.doi.org/10.1007/s11671-007-9042-z

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3245660/
https://www.ncbi.nlm.nih.gov/pubmed/21806850
http://dx.doi.org/10.1007/s11671-007-9042-z

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