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High-rate low-temperature dc pulsed magnetron sputtering of photocatalytic TiO(2)films: the effect of repetition frequency
The article reports on low-temperature high-rate sputtering of hydrophilic transparent TiO(2)thin films using dc dual magnetron (DM) sputtering in Ar + O(2)mixture on unheated glass substrates. The DM was operated in a bipolar asymmetric mode and was equipped with Ti(99.5) targets of 50 mm in diamet...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2007
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3245660/ https://www.ncbi.nlm.nih.gov/pubmed/21806850 http://dx.doi.org/10.1007/s11671-007-9042-z |