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A Zinc Oxide Nanorod Ammonia Microsensor Integrated with a Readout Circuit on-a-Chip

A zinc oxide nanorod ammonia microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process was investigated. The structure of the ammonia sensor is composed of a sensitive film and polysilicon electrodes. The am...

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Detalles Bibliográficos
Autores principales: Yang, Ming-Zhi, Dai, Ching-Liang, Wu, Chyan-Chyi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3251973/
https://www.ncbi.nlm.nih.gov/pubmed/22247656
http://dx.doi.org/10.3390/s111211112