Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/...

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Detalles Bibliográficos
Autores principales: Cui, Feng, Liu, Wu, Chen, Wenyuan, Zhang, Weiping, Wu, Xiaosheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3251979/
https://www.ncbi.nlm.nih.gov/pubmed/22247662
http://dx.doi.org/10.3390/s111211206

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3251979/
https://www.ncbi.nlm.nih.gov/pubmed/22247662
http://dx.doi.org/10.3390/s111211206

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