A Z-Axis Quartz Cross-Fork Micromachined Gyroscope Based on Shear Stress Detection

Here we propose a novel quartz micromachined gyroscope. The sensor has a simple cross-fork structure in the x-y plane of quartz crystal. Shear stress rather than normal stress is utilized to sense Coriolis’ force generated by the input angular rate signal. Compared to traditional quartz gyroscopes,...

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Detalles Bibliográficos
Autores principales: Xie, Liqiang, Wu, Xuezhong, Li, Shengyi, Wang, Haoxu, Su, Jianbin, Dong, Peitao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264439/
https://www.ncbi.nlm.nih.gov/pubmed/22294887
http://dx.doi.org/10.3390/s100301573

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264439/
https://www.ncbi.nlm.nih.gov/pubmed/22294887
http://dx.doi.org/10.3390/s100301573

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