Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns

Precise and reproducible surface nanopatterning is the key for a successful ordered growth of GaN nanocolumns. In this work, we point out the main technological issues related to the patterning process, mainly surface roughness and cleaning, and mask adhesion to the substrate. We found that each of...

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Detalles Bibliográficos
Autores principales: Barbagini, Francesca, Bengoechea-Encabo, Ana, Albert, Steven, Martinez, Javier, Sanchez García, Miguel Angel, Trampert, Achim, Calleja, Enrique
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2011
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264675/
https://www.ncbi.nlm.nih.gov/pubmed/22168918
http://dx.doi.org/10.1186/1556-276X-6-632

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264675/
https://www.ncbi.nlm.nih.gov/pubmed/22168918
http://dx.doi.org/10.1186/1556-276X-6-632

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