Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to co...

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Detalles Bibliográficos
Autores principales: Dai, Ching-Liang, Lu, Po-Wei, Chang, Chienliu, Liu, Cheng-Yang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3267215/
https://www.ncbi.nlm.nih.gov/pubmed/22303167
http://dx.doi.org/10.3390/s91210158

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3267215/
https://www.ncbi.nlm.nih.gov/pubmed/22303167
http://dx.doi.org/10.3390/s91210158

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