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Effective surface oxidation of polymer replica molds for nanoimprint lithography
In nanoimprint lithography, a surface oxidation process is needed to produce an effective poly(dimethylsiloxane) coating that can be used as an anti-adhesive surface of template molds. However, the conventional photooxidation technique or acidic oxidative treatment cannot be easily applied to polyme...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2012
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3268084/ https://www.ncbi.nlm.nih.gov/pubmed/22221587 http://dx.doi.org/10.1186/1556-276X-7-39 |