Synthesis of highly transparent ultrananocrystalline diamond films from a low-pressure, low-temperature focused microwave plasma jet

This paper describes a new low-temperature process underlying the synthesis of highly transparent ultrananocrystalline diamond [UNCD] films by low-pressure and unheated microwave plasma jet-enhanced chemical vapor deposition with Ar-1%CH(4)-10%H(2 )gas chemistry. The unique low-pressure/low-temperat...

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Detalles Bibliográficos
Autores principales: Liao, Wen-Hsiang, Wei, Da-Hua, Lin, Chii-Ruey
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3271979/
https://www.ncbi.nlm.nih.gov/pubmed/22260391
http://dx.doi.org/10.1186/1556-276X-7-82

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3271979/
https://www.ncbi.nlm.nih.gov/pubmed/22260391
http://dx.doi.org/10.1186/1556-276X-7-82

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