A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme

This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive tempera...

Descripción completa

Detalles Bibliográficos
Autores principales: Ma, Rong-Hua, Wang, Dung-An, Hsueh, Tzu-Han, Lee, Chia-Yen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274140/
https://www.ncbi.nlm.nih.gov/pubmed/22346708
http://dx.doi.org/10.3390/s90705460

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274140/
https://www.ncbi.nlm.nih.gov/pubmed/22346708
http://dx.doi.org/10.3390/s90705460

Ejemplares similares