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A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme

This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and flow direction comprising four silicon nitride cantilever beams arranged in a cross-form configuration, a circular hot-wire flow meter suspended on a silicon nitride membrane, and an integrated resistive tempera...

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Detalles Bibliográficos
Autores principales:	Ma, Rong-Hua, Wang, Dung-An, Hsueh, Tzu-Han, Lee, Chia-Yen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2009
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274140/ https://www.ncbi.nlm.nih.gov/pubmed/22346708 http://dx.doi.org/10.3390/s90705460

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