Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a...

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Detalles Bibliográficos
Autores principales: Chang, Honglong, Shen, Qiang, Zhou, Zhiguang, Xie, Jianbing, Jiang, Qinghua, Yuan, Weizheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274250/
https://www.ncbi.nlm.nih.gov/pubmed/22319329
http://dx.doi.org/10.3390/s100403835

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274250/
https://www.ncbi.nlm.nih.gov/pubmed/22319329
http://dx.doi.org/10.3390/s100403835

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