Carbon Nanotube Integration with a CMOS Process

This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully invest...

Descripción completa

Detalles Bibliográficos
Autores principales: Perez, Maximiliano S., Lerner, Betiana, Resasco, Daniel E., Pareja Obregon, Pablo D., Julian, Pedro M., Mandolesi, Pablo S., Buffa, Fabian A., Boselli, Alfredo, Lamagna, Alberto
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274251/
https://www.ncbi.nlm.nih.gov/pubmed/22319330
http://dx.doi.org/10.3390/s100403857

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274251/
https://www.ncbi.nlm.nih.gov/pubmed/22319330
http://dx.doi.org/10.3390/s100403857

Ejemplares similares