Electrostatic Excitation for the Force Amplification of Microcantilever Sensors

This paper describes an electrostatic excited microcantilever sensor operating in static mode that is more sensitive than traditional microcantilevers. The proposed sensor comprises a simple microcantilever with electrostatic excitation ability and an optical or piezoresistive detector. Initially th...

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Detalles Bibliográficos
Autores principales: Shokuhfar, Ali, Heydari, Payam, Ebrahimi-Nejad, Salman
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274275/
https://www.ncbi.nlm.nih.gov/pubmed/22346633
http://dx.doi.org/10.3390/s111110129

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274275/
https://www.ncbi.nlm.nih.gov/pubmed/22346633
http://dx.doi.org/10.3390/s111110129

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