All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing

We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift...

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Detalles Bibliográficos
Autores principales: Reck, Kasper, Thomsen, Erik V., Hansen, Ole
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274304/
https://www.ncbi.nlm.nih.gov/pubmed/22346662
http://dx.doi.org/10.3390/s111110615

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274304/
https://www.ncbi.nlm.nih.gov/pubmed/22346662
http://dx.doi.org/10.3390/s111110615

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