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All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing
We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3274304/ https://www.ncbi.nlm.nih.gov/pubmed/22346662 http://dx.doi.org/10.3390/s111110615 |