Effects of process parameters on sheet resistance uniformity of fluorine-doped tin oxide thin films

An alternative indium-free material for transparent conducting oxides of fluorine-doped tin oxide [FTO] thin films deposited on polyethylene terephthalate [PET] was prepared by electron cyclotron resonance - metal organic chemical vapor deposition [ECR-MOCVD]. One of the essential issues regarding m...

Descripción completa

Detalles Bibliográficos
Autores principales: Hudaya, Chairul, Park, Ji Hun, Lee, Joong Kee
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3275492/
https://www.ncbi.nlm.nih.gov/pubmed/22221518
http://dx.doi.org/10.1186/1556-276X-7-17

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3275492/
https://www.ncbi.nlm.nih.gov/pubmed/22221518
http://dx.doi.org/10.1186/1556-276X-7-17

Ejemplares similares