Transparent SiON/Ag/SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering system

We have investigated the characteristics of a silicon oxynitride/silver/silicon oxynitride [SiON/Ag/SiON] multilayer passivation grown using a specially designed roll-to-roll [R2R] sputtering system on a flexible polyethersulfone substrate. Optical, structural, and surface properties of the R2R grow...

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Detalles Bibliográficos
Autores principales: Kim, Han-Ki, Cho, Chung-Ki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3275511/
https://www.ncbi.nlm.nih.gov/pubmed/22221400
http://dx.doi.org/10.1186/1556-276X-7-69

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3275511/
https://www.ncbi.nlm.nih.gov/pubmed/22221400
http://dx.doi.org/10.1186/1556-276X-7-69

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