Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment

This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a...

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Detalles Bibliográficos
Autores principales: Pavlin, Marko, Belavic, Darko, Novak, Franc
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2011
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3279215/
https://www.ncbi.nlm.nih.gov/pubmed/22368471
http://dx.doi.org/10.3390/s120100320

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3279215/
https://www.ncbi.nlm.nih.gov/pubmed/22368471
http://dx.doi.org/10.3390/s120100320

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