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Ceramic MEMS Designed for Wireless Pressure Monitoring in the Industrial Environment
This paper presents the design of a wireless pressure-monitoring system for harsh-environment applications. Two types of ceramic pressure sensors made with a low-temperature cofired ceramic (LTCC) were considered. The first type is a piezoresistive strain gauge pressure sensor. The second type is a...
Autores principales: | Pavlin, Marko, Belavic, Darko, Novak, Franc |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2011
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3279215/ https://www.ncbi.nlm.nih.gov/pubmed/22368471 http://dx.doi.org/10.3390/s120100320 |
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