A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors

A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the reso...

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Detalles Bibliográficos
Autores principales: Zhang, Chi, Zhang, Gaofei, You, Zheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280767/
https://www.ncbi.nlm.nih.gov/pubmed/22389621
http://dx.doi.org/10.3390/s90100631

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280767/
https://www.ncbi.nlm.nih.gov/pubmed/22389621
http://dx.doi.org/10.3390/s90100631

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