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A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors
A compact two-dimensional micro scanner with small volume, large deflection angles and high frequency is presented and the two-dimensional laser scanning is achieved by specular reflection. To achieve large deflection angles, the micro scanner excited by a piezoelectric actuator operates in the reso...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2009
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280767/ https://www.ncbi.nlm.nih.gov/pubmed/22389621 http://dx.doi.org/10.3390/s90100631 |