Performance of a Diaphragmed Microlens for a Packaged Microspectrometer

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length a...

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Detalles Bibliográficos
Autores principales: Lo, Joe, Chen, Shih-Jui, Fang, Qiyin, Papaioannou, Thanassis, Kim, Eun-Sok, Gundersen, Martin, Marcu, Laura
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280835/
https://www.ncbi.nlm.nih.gov/pubmed/22399943
http://dx.doi.org/10.3390/s90200859

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3280835/
https://www.ncbi.nlm.nih.gov/pubmed/22399943
http://dx.doi.org/10.3390/s90200859

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