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Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing
A high speed MEMS flow sensor to enhance the reliability and accuracy of a liquid dispensing system is proposed. Benefitting from the sensor information feedback, the system can self-adjust the open time of the solenoid valve to accurately dispense desired volumes of reagent without any pre-calibrat...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2009
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3291902/ https://www.ncbi.nlm.nih.gov/pubmed/22408517 http://dx.doi.org/10.3390/s90604138 |