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Design and Fabrication of a MEMS Flow Sensor and Its Application in Precise Liquid Dispensing

A high speed MEMS flow sensor to enhance the reliability and accuracy of a liquid dispensing system is proposed. Benefitting from the sensor information feedback, the system can self-adjust the open time of the solenoid valve to accurately dispense desired volumes of reagent without any pre-calibrat...

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Detalles Bibliográficos
Autores principales:	Liu, Yaxin, Chen, Liguo, Sun, Lining
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2009
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3291902/ https://www.ncbi.nlm.nih.gov/pubmed/22408517 http://dx.doi.org/10.3390/s90604138

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