Development of a Prototype Miniature Silicon Microgyroscope

A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including a...

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Detalles Bibliográficos
Autores principales: Xia, Dunzhu, Chen, Shuling, Wang, Shourong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3291928/
https://www.ncbi.nlm.nih.gov/pubmed/22408543
http://dx.doi.org/10.3390/s90604586

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3291928/
https://www.ncbi.nlm.nih.gov/pubmed/22408543
http://dx.doi.org/10.3390/s90604586

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