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Development of a Prototype Miniature Silicon Microgyroscope
A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including a...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2009
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3291928/ https://www.ncbi.nlm.nih.gov/pubmed/22408543 http://dx.doi.org/10.3390/s90604586 |
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author | Xia, Dunzhu Chen, Shuling Wang, Shourong |
author_facet | Xia, Dunzhu Chen, Shuling Wang, Shourong |
author_sort | Xia, Dunzhu |
collection | PubMed |
description | A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/(°)/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15(°)/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 (°)C to 80 (°)C. |
format | Online Article Text |
id | pubmed-3291928 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2009 |
publisher | Molecular Diversity Preservation International (MDPI) |
record_format | MEDLINE/PubMed |
spelling | pubmed-32919282012-03-09 Development of a Prototype Miniature Silicon Microgyroscope Xia, Dunzhu Chen, Shuling Wang, Shourong Sensors (Basel) Article A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/(°)/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15(°)/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 (°)C to 80 (°)C. Molecular Diversity Preservation International (MDPI) 2009-06-11 /pmc/articles/PMC3291928/ /pubmed/22408543 http://dx.doi.org/10.3390/s90604586 Text en © 2009 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/). |
spellingShingle | Article Xia, Dunzhu Chen, Shuling Wang, Shourong Development of a Prototype Miniature Silicon Microgyroscope |
title | Development of a Prototype Miniature Silicon Microgyroscope |
title_full | Development of a Prototype Miniature Silicon Microgyroscope |
title_fullStr | Development of a Prototype Miniature Silicon Microgyroscope |
title_full_unstemmed | Development of a Prototype Miniature Silicon Microgyroscope |
title_short | Development of a Prototype Miniature Silicon Microgyroscope |
title_sort | development of a prototype miniature silicon microgyroscope |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3291928/ https://www.ncbi.nlm.nih.gov/pubmed/22408543 http://dx.doi.org/10.3390/s90604586 |
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