Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods

This paper presents a computational method for detecting vibrations related to eccentricity in ultra precision rotation devices used for nano-scale manufacturing. The vibration is indirectly measured via a frequency domain analysis of the signal from a piezoelectric sensor attached to the stationary...

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Detalles Bibliográficos
Autores principales: del Toro, Raúl M., Haber, Rodolfo E., Schmittdiel, Michael C.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3292158/
https://www.ncbi.nlm.nih.gov/pubmed/22399918
http://dx.doi.org/10.3390/s100504983

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3292158/
https://www.ncbi.nlm.nih.gov/pubmed/22399918
http://dx.doi.org/10.3390/s100504983

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