Cargando…
Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods
This paper presents a computational method for detecting vibrations related to eccentricity in ultra precision rotation devices used for nano-scale manufacturing. The vibration is indirectly measured via a frequency domain analysis of the signal from a piezoelectric sensor attached to the stationary...
| Autores principales: | , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2010
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3292158/ https://www.ncbi.nlm.nih.gov/pubmed/22399918 http://dx.doi.org/10.3390/s100504983 |