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SiO(x)/SiN(y )multilayers for photovoltaic and photonic applications
Microstructural, electrical, and optical properties of undoped and Nd(3+)-doped SiO(x)/SiN(y )multilayers fabricated by reactive radio frequency magnetron co-sputtering have been investigated with regard to thermal treatment. This letter demonstrates the advantages of using SiN(y )as the alternating...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3293743/ https://www.ncbi.nlm.nih.gov/pubmed/22333343 http://dx.doi.org/10.1186/1556-276X-7-124 |