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Growth behavior of titanium dioxide thin films at different precursor temperatures
The hydrophilic TiO(2 )films were successfully deposited on slide glass substrates using titanium tetraisopropoxide as a single precursor without carriers or bubbling gases by a metal-organic chemical vapor deposition method. The TiO(2 )films were employed by scanning electron microscopy, Fourier tr...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3296554/ https://www.ncbi.nlm.nih.gov/pubmed/22280933 http://dx.doi.org/10.1186/1556-276X-7-89 |