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Deflection, Frequency, and Stress Characteristics of Rectangular, Triangular, and Step Profile Microcantilevers for Biosensors
This study presents the deflection, resonant frequency and stress results of rectangular, triangular, and step profile microcantilevers subject to surface stress. These cantilevers can be used as the sensing element in microcantilever biosensors. To increase the overall sensitivity of microcantileve...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2009
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3312429/ https://www.ncbi.nlm.nih.gov/pubmed/22454571 http://dx.doi.org/10.3390/s90806046 |