Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors

The pH sensing and nonideal characteristics of a ruthenium nitride (RuN) sensing membrane pH sensor were investigated. RuN thin films were deposited from a 99.9% ruthenium target on p-type silicon substrates using radio frequency (r.f.) sputtering with N(2) gas. Subsequently, the nanometric structur...

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Detalles Bibliográficos
Autores principales: Liao, Yi-Hung, Chou, Jung-Chuan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3348812/
https://www.ncbi.nlm.nih.gov/pubmed/22574026
http://dx.doi.org/10.3390/s90402478

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3348812/
https://www.ncbi.nlm.nih.gov/pubmed/22574026
http://dx.doi.org/10.3390/s90402478

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