A MEMS-based Benzene Gas Sensor with a Self-heating WO(3) Sensing Layer

In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO(3) sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO(3) sensing layer. This c...

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Detalles Bibliográficos
Autores principales: Ke, Ming-Tsun, Lee, Mu-Tsun, Lee, Chia-Yen, Fu, Lung-Ming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3348818/
https://www.ncbi.nlm.nih.gov/pubmed/22574052
http://dx.doi.org/10.3390/s90402895

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3348818/
https://www.ncbi.nlm.nih.gov/pubmed/22574052
http://dx.doi.org/10.3390/s90402895

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