Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuat...

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Detalles Bibliográficos
Autores principales: Shakoor, Rana Iqtidar, Bazaz, Shafaat Ahmed, Kraft, Michael, Lai, Yongjun, Masood ul Hassan, Muhammad
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3348830/
https://www.ncbi.nlm.nih.gov/pubmed/22574020
http://dx.doi.org/10.3390/s90402389

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3348830/
https://www.ncbi.nlm.nih.gov/pubmed/22574020
http://dx.doi.org/10.3390/s90402389

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