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Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs
High force, large displacement and low voltage consumption are a primary concern for microgyroscopes. The chevron-shaped thermal actuators are unique in terms of high force generation combined with the large displacements at a low operating voltage in comparison with traditional electrostatic actuat...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2009
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3348830/ https://www.ncbi.nlm.nih.gov/pubmed/22574020 http://dx.doi.org/10.3390/s90402389 |