A Fiber Optic Catalytic Sensor for Neutral Atom Measurements in Oxygen Plasma

The presented sensor for neutral oxygen atom measurement in oxygen plasma is a catalytic probe which uses fiber optics and infrared detection system to measure the gray body radiation of the catalyst. The density of neutral atoms can be determined from the temperature curve of the probe, because the...

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Detalles Bibliográficos
Autores principales: Zaplotnik, Rok, Vesel, Alenka, Mozetic, Miran
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2012
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3355386/
https://www.ncbi.nlm.nih.gov/pubmed/22666005
http://dx.doi.org/10.3390/s120403857

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3355386/
https://www.ncbi.nlm.nih.gov/pubmed/22666005
http://dx.doi.org/10.3390/s120403857

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