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Early stages of growth of gold layers sputter deposited on glass and silicon substrates

Extremely thin gold layers were sputter deposited on glass and silicon substrates, and their thickness and morphology were studied by Rutherford backscattering (RBS) and atomic force microscopy (AFM) methods. The deposited layers change from discontinuous to continuous ones for longer deposition tim...

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Detalles Bibliográficos
Autores principales: Malinský, Petr, Slepička, Petr, Hnatowicz, Vladimír, Švorčík, Václav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3405445/
https://www.ncbi.nlm.nih.gov/pubmed/22559151
http://dx.doi.org/10.1186/1556-276X-7-241