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Early stages of growth of gold layers sputter deposited on glass and silicon substrates
Extremely thin gold layers were sputter deposited on glass and silicon substrates, and their thickness and morphology were studied by Rutherford backscattering (RBS) and atomic force microscopy (AFM) methods. The deposited layers change from discontinuous to continuous ones for longer deposition tim...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3405445/ https://www.ncbi.nlm.nih.gov/pubmed/22559151 http://dx.doi.org/10.1186/1556-276X-7-241 |