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Analysis of p-Si macropore etching using FFT-impedance spectroscopy

The dependence of the etch mechanism of lithographically seeded macropores in low-doped p-type silicon on water and hydrofluoric acid (HF) concentrations has been investigated. Using different HF concentrations (prepared from 48 and 73 wt.% HF) in organic electrolytes, the pore morphologies of etche...

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Detalles Bibliográficos
Autores principales: Ossei-Wusu, Emmanuel, Carstensen, Jürgen, Föll, Helmut
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3413546/
https://www.ncbi.nlm.nih.gov/pubmed/22716663
http://dx.doi.org/10.1186/1556-276X-7-320