Relation between electrical properties of aerosol-deposited BaTiO(3) thin films and their mechanical hardness measured by nano-indentation

To achieve a high capacitance density for embedded decoupling capacitor applications, the aerosol deposition (AD) process was applied as a thin film deposition process. BaTiO(3) films were fabricated on Cu substrates by the AD process at room temperature, and the film thickness was reduced to confir...

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Detalles Bibliográficos
Autores principales: Kim, Hong-Ki, Oh, Jong-Min, In Kim, Soo, Kim, Hyung-Jun, Lee, Chang Woo, Nam, Song-Min
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2012
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3422166/
https://www.ncbi.nlm.nih.gov/pubmed/22616759
http://dx.doi.org/10.1186/1556-276X-7-264

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3422166/
https://www.ncbi.nlm.nih.gov/pubmed/22616759
http://dx.doi.org/10.1186/1556-276X-7-264

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